Cite
HARVARD Citation
Yamane, T. et al. (2013). Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe. Contributions to plasma physics. 53 (8), pp. 588-591. [Online].
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Yamane, T. et al. (2013). Measurements of SiH4/H2 VHF Plasma Parameters with Heated Langmuir Probe. Contributions to plasma physics. 53 (8), pp. 588-591. [Online].