Interface characterization of B4C‐based multilayers by X‐ray grazing‐incidence reflectivity and diffuse scattering. (20th March 2013)

• Record Type: Journal Article
• Authors: Jiang, Hui; Wang, Zhanshan; Zhu, Jingtao
• Is Part Of: Journal of synchrotron radiation. Volume 20:Part 3(2013)
• Page Start: 449
• Page End: 454
• Publication Date: 2013-03-20
• Subjects: Synchrotron radiation -- Periodicals; Free electron lasers -- Periodicals; 539.73505
• DOI: 10.1107/S0909049513004329
• Languages: English
• ISSNs: 0909-0495

Abstract

<abstract abstract-type="main" xml:lang="en"> <title> <x xml:space="preserve">Abstract</x> </title> <p>B₄C‐based multilayers have important applications for soft to hard X‐rays. In this paper, X‐ray grazing‐incidence reflectivity and diffuse scattering, combining various analysis methods, were used to characterize the structure of B₄C‐based multilayers including layer thickness, density, interfacial roughness, interdiffusion, correlation length, <italic>etc.</italic> Quantitative results for W/B₄C, Mo/B₄C and La/B₄C multilayers were compared. W/B₄C multilayers show the sharpest interfaces and most stable structures. The roughness replications of La/B₄C and Mo/B₄C multilayers are not strong, and oxidations and structure expansions are found in the aging process. This work provides guidance for future fabrication and characterization of B₄C‐based multilayers.</p> </abstract>