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Nečas, D. et al. (n.d.). Ellipsometric characterization of inhomogeneous non‐stoichiometric silicon nitride films. Surface and interface analysis. pp. 1188-1192. [Online].
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Nečas, D. et al. (n.d.). Ellipsometric characterization of inhomogeneous non‐stoichiometric silicon nitride films. Surface and interface analysis. pp. 1188-1192. [Online].