Semiconductor devices. Micro-electromechanical devices. Environmental test methods of MEMS piezoelectric thin films for sensor application Part 37, (5th April 2023)

Record Type:
Book
Title:
Semiconductor devices. Micro-electromechanical devices. Environmental test methods of MEMS piezoelectric thin films for sensor application Part 37, (5th April 2023)
Main Title:
Semiconductor devices. Micro-electromechanical devices.
Authors:
British Standards Institution,
Issue Display:
Part 37
Part:
37
Issue Sort Value:
0000-0000-0000-0037
Publisher Details:
London : British Standards Institution
Publication Date:
2023
Extent:
1 online resource (20 pages)
Subjects:
602.1841
Durability
Sensors
Thin films
Test methods
Semiconductor devices
Electromechanical storage
Environmental testing
Piezoelectric devices
Languages:
English
Related ISBNs:
9780539025330
ISSNs:
3038-3936
Access Rights:
Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:
Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:
British Library HMNTS - ELD.DS.770149
Ingest File:
19_012.xml