BS EN ISO 14644-9. Cleanrooms and associated controlled environments. Part 9. Assessment of surface cleanliness for particle concentration (4th February 2022)

Record Type:: Book
Title:: BS EN ISO 14644-9. Cleanrooms and associated controlled environments. Part 9. Assessment of surface cleanliness for particle concentration (4th February 2022)
Main Title:: BS EN ISO 14644-9. Cleanrooms and associated controlled environments.
Authors:: British Standards Institution,
Publisher Details:: London : British Standards Institution
Publication Date:: 2022
Extent:: 1 online resource (36 pages)
Subjects:: 602.1841
Environmental cleanliness
Contamination
Molecules
Clean rooms
Surfaces
Environment (working)
Chemical analysis and testing
Cleaning equipment
Languages:: English
ISSNs:: 3043-0221
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Ingest File:: 10_006.xml