Efficient extreme ultraviolet mirror design : an FDTD approach /: an FDTD approach. ([2021])

• Record Type: Book
• Further Information: Note: Yen-Min Lee.
• Authors: Lee, Yen-Min
• Other Names: Institute of Physics (Great Britain), publisher.
• Contents: 1. Introduction to optical lithography -- 1.1. Principle of optical lithography -- 1.2. Evolution and history -- 1.3. Interrelation with IC manufacturing -- 1.4. The next-generation optical lithography : extreme ultraviolet (EUV) lithography 2. Multilayer mirrors in extreme ultraviolet lithography -- 2.1. Composition and fabrication -- 2.2. ML based EUV photomasks -- 2.3. Multilayer mirror physics -- 2.4. Quarter-wavelength EUV mirror (Bragg mirror) -- 2.5. Photonic crystal (PHC) EUV mirror 3. Efficient finite-difference time-domain (FDTD) approach -- 3.1. Numerical methods for EUV mirror design -- 3.2. FDTD expression for Maxwell's equation -- 3.3. Boundary conditions -- 3.4. Efficient FDTD method -- the equivalent layer approach 4. Simulation cases -- 4.1. 2D simulation : EUV mirror with surface roughness -- 4.2. 3D simulation : EUV mirror patterned with periodic contact holes -- 4.3. 3D simulation : porous EUV mirror 5. Summaries and challenges -- 5.1. Summaries -- 5.2. Challenges.
• Publisher Details: Bristol [England] (Temple Circus, Temple Way, Bristol BS1 6HG, UK) : IOP Publishing
• Publication Date: 2021
• Extent: 1 online resource (various pagings), illustrations (some color)
• Subjects: 621.381531; Extreme ultraviolet lithography; Mirrors -- Design and construction; Finite differences -- Data processing; Time-domain analysis; Optical physics; Optics and photonics; Extreme ultraviolet lithography; Finite differences -- Data processing; Mirrors -- Design and construction; Time-domain analysis
• Languages: English
• ISBNs: 9780750326520; 0750326522; 9780750326513; 0750326514
• Related ISBNs: 9780750326506; 9780750326537
• Notes: Note: Includes bibliographical references.; Note: Title from PDF title page (viewed on October 9, 2021).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.