BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Part 4. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence (9th July 2021)

Record Type:
Book
Title:
BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Part 4. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence (9th July 2021)
Main Title:
BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices.
Authors:
British Standards Institution,
Publisher Details:
London : British Standards Institution
Publication Date:
2021
Extent:
1 online resource (26 pages)
Subjects:
602.1841
Semiconductor devices
Silicon carbide
Defects
Inspection
Evaluation
Languages:
English
ISSNs:
3044-0431
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British Library HMNTS - ELD.DS.625595
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