Surface metrology for micro- and nanofabrication. (2020)

• Record Type: Book
• Further Information: Note: Wei Gao.
• Authors: Gao, Wei, 1965-
• Contents: 1. Noncontact Scanning Electrostatic Force Microscope 2. Quartz Tuning Fork Atomic Force Microscope 3. Micropipette Ball Probing System 4. Low-Force Elastic Beam Surface Profiler 5. Linear-Scan Micro Roundness Measuring Machine 6. Micro-Gear Measuring Machine 7. On-Machine Length Gauge Surface Profiler 8. On-Machine Air-Bearing Surface Profiler 9. On-Machine Atomic Force Microscope 10. On-Machine Roll Profiler 11. In-Process Fast Tool Servo Profiler 12. Self-Calibration of Prove Tip Radius and Cutting Edge Sharpness
• Publisher Details: Amsterdam : Elsevier
• Publication Date: 2020
• Extent: 1 online resource
• Subjects: 620.50287; Nanostructured materials -- Measurement; Nanomanufacturing
• Languages: English
• ISBNs: 9780128178515
• Related ISBNs: 9780128178508
• Notes: Note: Description based on CIP data; resource not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.