Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM. (18th December 2019)

Record Type:: Book
Title:: Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM. (18th December 2019)
Main Title:: Microbeam analysis. Scanning electron microscopy. Method for evaluating critical dimensions by CDSEM.
Authors:: British Standards Institution,
Publisher Details:: London : British Standards Institution
Publication Date:: 2019
Extent:: 1 online resource (56 pages)
Subjects:: 602.1841
Scanning electron microscopes
Electron microscopes
Dimensions
Evaluation
Electrons
Analysis
Languages:: English
Related ISBNs:: 9780580948404
ISSNs:: 3034-4521
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.542214
Ingest File:: 03_150.xml