Whole-angle MEMs gyroscopes : challenges and opportunities /: challenges and opportunities. ([2020])

• Record Type: Book
• Further Information: Note: Doruk Senkal, Andrei M. Shkel.
• Authors: Senkal, Doruk, 1984-; Shkel, Andrei
• Contents: Cover -- Title Page -- Copyright Page -- Contents -- List of Abbreviations -- Preface -- About the Authors -- Part I Fundamentals of Whole-Angle Gyroscopes -- Chapter 1 Introduction -- 1.1 Types of Coriolis Vibratory Gyroscopes -- 1.1.1 Nondegenerate Mode Gyroscopes -- 1.1.2 Degenerate Mode Gyroscopes -- 1.2 Generalized CVG Errors -- 1.2.1 Scale Factor Errors -- 1.2.2 Bias Errors -- 1.2.3 Noise Processes -- 1.2.3.1 Allan Variance -- 1.3 Overview -- Chapter 2 Dynamics -- 2.1 Introduction to Whole-Angle Gyroscopes -- 2.2 Foucault Pendulum Analogy -- 2.2.1 Damping and Q-factor 2.2.1.1 Viscous Damping -- 2.2.1.2 Anchor Losses -- 2.2.1.3 Material Losses -- 2.2.1.4 Surface Losses -- 2.2.1.5 Mode Coupling Losses -- 2.2.1.6 Additional Dissipation Mechanisms -- 2.2.2 Principal Axes of Elasticity and Damping -- 2.3 Canonical Variables -- 2.4 Effect of Structural Imperfections -- 2.5 Challenges of Whole-Angle Gyroscopes -- Chapter 3 Control Strategies -- 3.1 Quadrature and Coriolis Duality -- 3.2 Rate Gyroscope Mechanization -- 3.2.1 Open-loop Mechanization -- 3.2.1.1 Drive Mode Oscillator -- 3.2.1.2 Amplitude Gain Control -- 3.2.1.3 Phase Locked Loop/Demodulation 3.2.1.4 Quadrature Cancellation -- 3.2.2 Force-to-rebalance Mechanization -- 3.2.2.1 Force-to-rebalance Loop -- 3.2.2.2 Quadrature Null Loop -- 3.3 Whole-Angle Mechanization -- 3.3.1 Control System Overview -- 3.3.2 Amplitude Gain Control -- 3.3.2.1 Vector Drive -- 3.3.2.2 Parametric Drive -- 3.3.3 Quadrature Null Loop -- 3.3.3.1 AC Quadrature Null -- 3.3.3.2 DC Quadrature Null -- 3.3.4 Force-to-rebalance and Virtual Carouseling -- 3.4 Conclusions -- Part II 2-D Micro-Machined Whole-Angle Gyroscope Architectures -- Chapter 4 Overview of 2-D Micro-Machined Whole-Angle Gyroscopes 4.1 2-D Micro-Machined Whole-Angle Gyroscope Architectures -- 4.1.1 Lumped Mass Systems -- 4.1.2 Ring/Disk Systems -- 4.1.2.1 Ring Gyroscopes -- 4.1.2.2 Concentric Ring Systems -- 4.1.2.3 Disk Gyroscopes -- 4.2 2-D Micro-Machining Processes -- 4.2.1 Traditional Silicon MEMS Process -- 4.2.2 Integrated MEMS/CMOS Fabrication Process -- 4.2.3 Epitaxial Silicon Encapsulation Process -- Chapter 5 Example 2-D Micro-Machined Whole-Angle Gyroscopes -- 5.1 A Distributed Mass MEMS Gyroscope -- Toroidal Ring Gyroscope -- 5.1.1 Architecture -- 5.1.1.1 Electrode Architecture 5.1.2 Experimental Demonstration of the Concept -- 5.1.2.1 Fabrication -- 5.1.2.2 Experimental Setup -- 5.1.2.3 Mechanical Characterization -- 5.1.2.4 Rate Gyroscope Operation -- 5.1.2.5 Comparison of Vector Drive and Parametric Drive -- 5.2 A Lumped Mass MEMS Gyroscope -- Dual Foucault Pendulum Gyroscope -- 5.2.1 Architecture -- 5.2.1.1 Electrode Architecture -- 5.2.2 Experimental Demonstration of the Concept -- 5.2.2.1 Fabrication -- 5.2.2.2 Experimental Setup -- 5.2.2.3 Mechanical Characterization -- 5.2.2.4 Rate Gyroscope Operation -- 5.2.2.5 Parameter Identification
• Publisher Details: Hoboken, New Jersey Piscataway, NJ : John Wiley & Sons, Inc IEEE Press
• Publication Date: 2020
• Extent: 1 online resource (xiv, 153 pages), illustrations (chiefly color)
• Subjects: 681/.753; Gyroscopes; Adaptive control systems; Accelerometers; Microelectromechanical systems; Accelerometers; Adaptive control systems; Gyroscopes; Microelectromechanical systems; Electronic books
• Languages: English
• ISBNs: 9781119441908; 1119441900; 9781119441922; 1119441927; 1119441862; 9781119441861
• Related ISBNs: 9781119441885; 1119441889
• Notes: Note: Includes bibliographical references and index.; Note: Description based on online resource; title from digital title page (viewed on June 24, 2020).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.