A practical guide to optical metrology for thin films. (2012)

• Record Type: Book
• Further Information: Note: Michael Quinten.
• Other Names: Quinten, Michael
• Contents: Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement. 7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index.
• Publisher Details: Weinheim Chichester : Wiley-VCH John Wiley [distributor]
• Publication Date: 2012
• Extent: 1 online resource, illustrations
• Subjects: 530.4/275; Thin films -- Optical properties; SCIENCE -- Energy; SCIENCE -- Mechanics -- General; SCIENCE -- Physics -- General; Thin films -- Optical properties; Electronic books
• Languages: English
• ISBNs: 9783527664344; 3527664343; 9783527664351; 3527664351; 9781299475991; 9783527664375; 3527664378; 9783527664368
• Related ISBNs: 129947599X; 352766436X; 3527411674; 9783527411672; 9783527664368
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.