Laser heat-mode lithography : principle and methods /: principle and methods. ([2019])
- Record Type:
- Book
- Title:
- Laser heat-mode lithography : principle and methods /: principle and methods. ([2019])
- Main Title:
- Laser heat-mode lithography : principle and methods
- Further Information:
- Note: Jingsong Wei.
- Authors:
- Wei, Jingsong
- Contents:
- Current status of lithography -- Principles of laser heat-mode lithography and thermal diffusion -- Laser heat-mode maskless lithography system -- Manipulation of thermal diffusion channels -- Laser heat-mode nanolithography on phase-change thin films -- Direct laser heat-mode nanopatterning on metallo-organic compound thin films -- Laser heat-mode patterning of transparent thin films -- Laser heat-mode grayscale image lithography -- Patterns transfer processes and applications.
- Publisher Details:
- Singapore : Springer Nature Singapore Pte Ltd
- Publication Date:
- 2019
- Copyright Date:
- 2019
- Extent:
- 1 online resource (xiii, 208 pages), illustrations (some color)
- Subjects:
- 686.2/315
Lithography
Lithography
Electronic books - Languages:
- English
- ISBNs:
- 9789811509438
9811509433 - Related ISBNs:
- 9789811509421
9811509425 - Notes:
- Note: Includes bibliographical references.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.474229
- Ingest File:
- 03_027.xml