MEMS : field models and optimal design /: field models and optimal design. ([2020])

• Record Type: Book
• Further Information: Note: Paolo Di Barba, Slawomir Wiak.
• Authors: Di Barba, Paolo; Wiak, S (Sławomir)
• Contents: Introduction -- MEMS modelling: distributed vs lumped parameter models -- Engineering electrostatics and boundary-value problems -- Engineering magnetostatics and boundary-value problems -- Steady-conduction field and boundary-value problems.
• Publisher Details: Cham, Switzerland : Springer
• Publication Date: 2020
• Extent: 1 online resource, illustrations
• Subjects: 621.381; Microelectromechanical systems; Microelectromechanical systems -- Design and construction; Microelectromechanical systems -- Mathematical models; Electronic books
• Languages: English
• ISBNs: 9783030214968; 3030214966
• Related ISBNs: 9783030214951
• Notes: Note: Includes bibliographical references.; Note: Online resource; title from PDF title page (EBSCO, viewed June 28, 2019).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.