Mikrosystemtechnik : Vom Transistor zum Biochip /: Vom Transistor zum Biochip. (2016)

• Record Type: Book
• Further Information: Note: Von Stephanus Büttgenbach.
• Authors: Büttgenbach, Stephanus
• Contents: Einleitung -- Transistor und Halbleitertechnik -- Piezoresistiver Effekt -- Bulk Micromachining -- LIGA-Verfahren -- Surface Micromachining -- Atomic Force Microscope (AFM) -- Entwicklung von Ultrakurzpulslasern -- µTAS (Micro Total Analysis System)-Konzept -- Deep Reactive Ion Etching (DRIE) -- Soft-Lithografie -- Die Zukunft.
• Publisher Details: Berlin, Heidelberg : Springer Berlin Heidelberg Imprint: Springer
• Publication Date: 2016
• Extent: 1 online resource (VIII, 151 S. 52 Abb.)
• Subjects: 600; Micromechanics; Systems engineering; Microtechnology; Microelectronics; Microelectronics; Micromechanics; Microtechnology; Systems engineering; Electronic books
• Languages: German
• ISBNs: 3662497727; 9783662497722; 3662497735; 9783662497739
• Notes: Note: Includes bibliographical references and index.; Note: Description based on online resource; title from PDF title page (ebrary, viewed November 8, 2016).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.