Introduction to microsystem design. (2015)

• Record Type: Book
• Further Information: Note: Werner Karl Schomburg.
• Authors: Schomburg, Werner Karl, 1955-
• Contents: Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
• Edition: Second edition
• Publisher Details: Heidelberg : Springer
• Publication Date: 2015
• Extent: 1 online resource
• Subjects: 621.381; Microelectromechanical systems -- Design and construction; TECHNOLOGY & ENGINEERING -- Mechanical; Microelectromechanical systems -- Design and construction; Engineering; Electronics and Microelectronics, Instrumentation; Circuits and Systems; Nanotechnology and Microengineering; Electronic books
• Languages: English
• ISBNs: 9783662470237; 3662470233; 3662470225; 9783662470220
• Related ISBNs: 9783662470220
• Notes: Note: Includes bibliographical references and index.; Note: Online resource; title from PDF title page (SpringerLink, viewed June 29, 2015).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.