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Hilleringmann, U. (2018) Silizium-Halbleitertechnologie : Grundlagen mikroelektronischer Integrationstechnik. [Online]. Wiesbaden : Springer Vieweg. Available from: http://access.bl.uk/ark:/81055/vdc_100077915720.0x000001
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Hilleringmann, U. (2018) Silizium-Halbleitertechnologie : Grundlagen mikroelektronischer Integrationstechnik. [Online]. Wiesbaden : Springer Vieweg. Available from: http://access.bl.uk/ark:/81055/vdc_100077915720.0x000001