Silizium-Halbleitertechnologie : Grundlagen mikroelektronischer Integrationstechnik /: Grundlagen mikroelektronischer Integrationstechnik. (2018)

• Record Type: Book
• Further Information: Note: Ulrich Hilleringmann.
• Authors: Hilleringmann, Ulrich
• Contents: Herstellung von Siliziumscheiben.- Oxidation des dotierten Siliziums.- Lithografie.- Ätztechnik.- Dotiertechniken.- Depositionsverfahren.- Metallisierung und Kontakte.- Scheibenreinigung.- MOS-Technologien zur Schaltungsintegration.- Erweiterungen zur Höchstintegration.- Bipolar-Technologie.- Montage integrierter Schaltungen.
• Edition: Seventh edition
• Publisher Details: Wiesbaden : Springer Vieweg
• Publication Date: 2018
• Copyright Date: 2019
• Extent: 1 online resource (275 pages)
• Subjects: Engineering; Electronics; Systems engineering; Technology & Engineering -- Electronics -- Circuits -- General; Technology & Engineering -- Electronics -- Semiconductors; Circuits & components; Semi-conductors & super-conductors; Technology & Engineering -- Electronics -- General; Electronics engineering
• Languages: German
• ISBNs: 9783658234447
• Related ISBNs: 9783658234430
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.