Catalytic Chemical Vapor Deposition : Technology and Applications of Cat-CVD /: Technology and Applications of Cat-CVD. ([2019])

• Record Type: Book
• Further Information: Note: Hideki Matsumura and 3 others.
• Authors: Matsumura, H (Hideki)
• Contents: INTRODUCTION; Thin Film Technologies; Birth of Cat-CVD; Research History of Cat-CVD and Related Technologies; Structure of this book; ; FUNDAMENTALS FOR STUDYING ON PHYSICS OF CAT-CVD AND DIFFERENCE FROM PECVD; Fundamental Physics in Deposition Chamber; Fundamental Difference between Cat-CVD and PECVD Apparatuses; Features of Conventional PECVD; Drawback of PECVD and Technology Overcoming Them; Features of Cat-CVD as Technology Overcoming Drawback of PECVD; ; FUNDAMENTALS FOR ANALYTICAL METHODS FOR REVEALING CHEMICAL REACTIONS IN CAT-CVD; Importance of Radical Process in CVD Processes; Radical Detection Technique; One-Photon Laser Induced Fluorescence (LIF); Two-Photon Laser Induced Fluorescence; Single Path VUV Laser Absorption; Other Laser Spectroscopic Techniques; Mass Spectrometric Technique; ; PHYSICS AND CHEMISTRY OF CAT-CVD; Kinetics of Molecules in Chambers; Gas Temperature Distribution in Cat-CVD Chambers; Decomposition Processes on Metal Wire Surfaces; Model of Decomposition of SiH4 on Metal Surfaces; Summary: Film Deposition Mechanisms in Cat-CVD; ; PROPERTIES OF FILMS PREPARED BY CAT-CVD; Properties of Amorphous-Silicon (a-Si); Crystallization of Silicon Films and Micro-Crystalline Silicon; Properties of Silicon-Nitride (SiNx); Formation and Properties of SiOxNy; Properties of Silicon-Dioxide (SiO2) Prepared by Cat-CVD; Properties of Aluminum-Oxide (Al2O3); Properties of Other Inorganic Films; Summary: What can be made by Cat-CVD?; ; ORGANIC POLYMER SYNTHESIS BY CAT-CVD RELATED TECHNOLOGY -; INITIATED CVD (I-CVD); PTFE Synthesis by Cat-CVD Related Technology; Various Organic Films Prepared by Cat-CVD Related Technology and i-CVD; Sources and Deposition Conditions for Synthesized Various Organic Films; Mechanism of Organic Film Formation by i-CVD; Summary and Future Prospect of i-CVD; ; PHYSICS AND TECHNOLOGIES FOR OPERATING CAT-CVD APPARATUSES; Influence of Gas Flow in Cat-CVD Apparatuses; Factors Deciding Film Uniformity; Limit of Packing Density of Catalyzing Wires; Thermal Radiation from Heated Catalyzers; Contamination from Heated Catalyzers; Lifetime of Catalyzing Wires and Techniques to Expand Lifetime; Chamber Cleaning; Mass-Production Machines; ; APPLICATIONS OF CAT-CVD FILMS; Solar Cells; Thin Film Transistors (TFT); Surface Passivation on Compound Semiconductor Devices; Gas Barrier Films for Various Devices Such As Organic Devices; Gas Barrier Films for Food Packages; ULSI Application of Cat-CVD SiNx Films; Other Applications of Inorganic Films; Typical Application of Organic Films; Summary of Various Application and Future Prospects; ; RADICALS GENERATED IN CAT-CVD APPARATUS AND THEIR APPLICATION; Generation of High Density Hydrogen (H) Atoms; Cleaning and Etching by H Atoms Generated in Cat-CVD Apparatuses; Photo-Resist Removal by Hydrogen Atoms; Low Temperature Formation of Low Resistivity Metal Lines from Liquid Inks by H Atoms; Low Temperature Surface Oxidation and Nitridation; "Cat-Sputtering" -; A New Thin Film Deposition Utilizing Radicals; ; A NEW LOW TEMPERATURE IMPURITY DOPING TECHNOLOGY- CAT-DOPING; Invention of Cat-Doping; Low Temperature and Shallow Phosphorus (P) Doping into c-Si; Low Temperature Boron (B) Doping into c-Si; Low Temperature Nitrogen Doping into Silicon-Carbide (SiC); Feasibility of Cat-Doping for Various Applications; ; SUMMARY AND FUTURE PROSPECTS OF CAT-CVD;
• Publisher Details: Weinheim, Germany : Wiley-VCH
• Publication Date: 2019
• Extent: 1 online resource
• Subjects: 660.2995; Catalysts; Chemical vapor deposition; SCIENCE / Chemistry / Industrial & Technical; TECHNOLOGY & ENGINEERING / Chemical & Biochemical; Electronic books
• Languages: English
• ISBNs: 9783527818662; 3527818669
• Related ISBNs: 9783527345236
• Notes: Note: Includes bibliographical references and index.; Note: Online resource; title from PDF title page (EBSCO, viewed February 13, 2019).; Note: Vendor-supplied metadata.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.