Nanopositioning technologies : fundamentals and applications /: fundamentals and applications. ([2016])

• Record Type: Book
• Further Information: Note: Changhai Ru, Xinyu Liu, Yu Sun, editors.
• Editors: Ru, Changhai; (Mechanical engineer), Liu, Xinyu; Sun, Yu, 1974-
• Contents: 1. A review of stick-slip nanopositioning actuators -- 2. Piezoelectric motor technology: a review -- 3. Mechanical design of high-speed nanopositioning systems -- 4. Parallel-kinematic nanopositioning stages based on Roberts mechanism -- 5. Electro-magnetic nano-positioning -- 6. Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking control for nanopositioning systems -- 8. position sensors for nanopositioning -- 9. MEMS nanopositioners -- 10. Control issues of MEMS nanopositioning devices -- 11. A review of nanomanipulation in scanning electron microscopes -- 12. Nanopositioning for lithography and data storage.
• Publisher Details: Cham : Springer
• Publication Date: 2016
• Copyright Date: 2016
• Extent: 1 online resource (409 pages)
• Subjects: 620/.5; 620; Engineering; Nanoelectromechanical systems; TECHNOLOGY & ENGINEERING -- Engineering (General); TECHNOLOGY & ENGINEERING -- Reference; Nanoelectromechanical systems; Engineering; Nanotechnology and Microengineering; Electronics and Microelectronics, Instrumentation; Control, Robotics, Mechatronics; Engineering Design; Technology & Engineering -- Electronics -- General; Technology & Engineering -- Automation; Technology & Engineering -- Industrial Design -- Product; Electronics engineering; Automatic control engineering; Technical design; Electronics; Engineering design; Technology & Engineering -- Nanotechnology & MEMS; Precision instruments manufacture; Electronic books
• Languages: English
• ISBNs: 9783319238531; 3319238531
• Related ISBNs: 9783319238524; 3319238523
• Notes: Note: Includes bibliographical references.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.