Outlook and challenges of nano devices, sensors, and MEMS. ([2017])

• Record Type: Book
• Further Information: Note: Ting Li, Ziv Liu, editors.
• Other Names: Li, Ting; Liu, Ziv
• Contents: Introduction -- High-k dielectric for nanoscale MOS devices -- Performance, optimization, and reliability of FinFET devices -- Performance, optimization, and challenges of emerging nanowire field-effect transistors -- Graphene technology for future MEMS and sensor applications -- Nanoscale sensors for next-generation optical transceiver applications -- Nanoscale MEMS for future optical communication applications -- Nanoscale devices for biomedical applications -- Effect of nanoscale structure on reliability of nano devices and sensors -- Compact modeling of nano devices and sensors -- Three-dimensional TCAD simulation of nano semiconductor devices -- Fabrication of nano devices based on novel material -- Novel processing technology for fabricating nano devices and sensors -- Conclusions.
• Publisher Details: Cham : Springer
• Publication Date: 2017
• Extent: 1 online resource (xvi, 521 pages), illustrations (some color)
• Subjects: 620/.5; Engineering; Nanotechnology; Microelectromechanical systems; Nanostructured materials; TECHNOLOGY & ENGINEERING -- Engineering (General); TECHNOLOGY & ENGINEERING -- Reference; Microelectromechanical systems; Nanostructured materials; Nanotechnology; Technology & Engineering -- Electronics -- Circuits -- General; Technology & Engineering -- Nanotechnology & MEMS; Circuits & components; Precision instruments manufacture; Nanotechnology; Systems engineering; Electronic books
• Languages: English
• ISBNs: 9783319508245; 3319508245
• Related ISBNs: 9783319508221; 3319508229
• Notes: Note: Includes bibliographical references at the end of each chapters.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.