Piezoelectric MEMS resonators. ([2017])

• Record Type: Book
• Further Information: Note: Harmeet Bhugra, Gianluca Piazza, editors.
• Editors: Bhugra, Harmeet; Piazza, Gianluca
• Contents: AIN Thin Film Processing and Basic Properties -- Lead Zirconate Titanate (PZT) for M/NEMS -- Gallium Nitride for M/NEMS -- Lithium Niobate for M/NEMS Resonators -- Quality Factor and Coupling in Piezoelectric MEMS Resonators -- Flexural Piezoelectric Resonators -- Laterally Vibrating Piezoelectric MEMS Resonators -- BAW Piezoelectric Resonators -- Shear Piezoelectric MEMS Resonators -- Temperature Compensation of Piezo-MEMS Resonators -- Computational Modeling Challenges -- Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators -- Reliability and Quality Assessment (Stability and Packages) -- Large Volume Testing and Calibration -- High Frequency Oscillators for Mobile Devices -- BAW Filters and Duplexers for Mobile Communication.
• Publisher Details: Cham, Switzerland : Springer Nature
• Publication Date: 2017
• Copyright Date: 2017
• Extent: 1 online resource (424 pages), illustrations
• Subjects: 621.381; Engineering; Microelectromechanical systems; Piezoelectric devices; TECHNOLOGY & ENGINEERING -- Mechanical; Microelectromechanical systems; Piezoelectric devices; Technology & Engineering -- Nanotechnology & MEMS; Technology & Engineering -- Material Science; Precision instruments manufacture; Nanotechnology; Electronic devices & materials; Electronics; Nanotechnology; Optical materials; Technology & Engineering -- Electronics -- General; Electronics engineering; Electronic books
• Languages: English
• ISBNs: 9783319286884; 3319286889
• Related ISBNs: 9783319286860; 3319286862
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.