Nanofabrication : principles and applications /: principles and applications. (2016)

• Record Type: Book
• Further Information: Note: Christo Papadopoulos.
• Authors: Papadopoulos, Christo
• Contents: Introduction -- Silicon Planar Processing and Photolithography -- Direct-write Lithography Approaches -- Stamping Methods -- Scanning-probe Methods -- Natural Lithography -- Direct-Growth and Self-assembly -- Practical Examples and Case Studies of Nanofabrication.
• Publisher Details: Switzerland : Springer
• Publication Date: 2016
• Extent: 1 online resource (vi, 81 pages), illustrations (some color)
• Subjects: 621.381; 620.11; Materials science; Nanolithography; TECHNOLOGY & ENGINEERING -- Mechanical; Nanolithography; Technology & Engineering -- Electronics -- General; Technology & Engineering -- Electronics -- Semiconductors; Science -- Nanostructures; Electronics engineering; Semi-conductors & super-conductors; Nanotechnology; Nanotechnology; Electronics; Technology & Engineering -- Nanotechnology & MEMS; Electronic books
• Languages: English
• ISBNs: 9783319317427; 3319317423
• Related ISBNs: 9783319317403; 3319317407
• Notes: Note: Includes bibliographical references.; Note: Online resource; title from PDF title page (SpringerLink, viewed August 8, 2016).
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.