Defect recognition and image processing in semiconductors 1997 : proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997 /: proceedings of the 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP VII) held in Templin, Germany, 7-10 September 1997. (2017)