MEMS : packaging and technology /: packaging and technology. (2017)

Record Type:: Book
Title:: MEMS : packaging and technology /: packaging and technology. (2017)
Main Title:: MEMS : packaging and technology
Further Information:: Note: Edited by Vikas Choudhary, Kris Iniewski.
Other Names:: Choudhary, Vikas
Iniewski, Krzysztof, 1960-
Publisher Details:: Place of publication not identified : CRC Press
Publication Date:: 2017
Extent:: 1 online resource (478 pages), (32 illustrations)
Subjects:: 621.381
Microelectromechanical systems
Microelectronic packaging
Languages:: English
ISBNs:: 9781351832281
Related ISBNs:: 135183228X
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.241643
Ingest File:: 02_280.xml