MEMS : design and fabrication /: design and fabrication. (2006)

• Record Type: Book
• Further Information: Note: Edited by Mohamed Gad-el-Hak.
• Other Names: Gad-el-Hak, Mohamed, 1945-
• Contents: Introduction; Mohamed Gad-el-Hak; Materials for Microelectromechanical Systems; Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon; MEMS Fabrication; Guangyao Jia and Marc J. Madou; LIGA and Micromolding; Guangyao Jia and Marc J. Madou; X-Ray Based Fabrication; Todd Christenson; EFAB® Technology and Applications; Adam L. Cohen and Chris A. Bang; Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Robert S. Okojie; Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Glenn M. Beheim and Laura J. Evans; Polymer Microsystems: Materials and Fabrication; Gary M. Atkinson and Zoubeida Ounaies; Optical Diagnostics to Investigate the Entrance Length in Microchannels; Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley; Microfabricated Chemical Sensors for Aerospace Applications; Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel; Packaging of Harsh Environment MEMS Devices; Liang-Yu Chen and Jih-Fen Lei; Fabrication Technologies for Nanoelectromechanical Systems; Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider; Molecular Self-Assembly: Fundamental Concepts and Applications; Jill A. Miwa and Federico Rosei; Index
• Edition: Second edition
• Publisher Details: Boca Raton, FL : CRC/Taylor & Francis
• Publication Date: 2006
• Extent: 1 online resource (1 volume (various pagings)), illustrations
• Subjects: 621.381; Microelectromechanical systems -- Design and construction; Microfabrication; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; TECHNOLOGY & ENGINEERING -- Electronics -- Digital; Microelectromechanical systems -- Design and construction; Microfabrication; Electronic books
• Languages: English
• ISBNs: 0849391385; 9780849391385; 0849321069; 9780849321061; 1420036564; 9781420036565
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.