Industrial plasma engineering. Applications to nonthermal plasma processing / Vol. 2, (2001)

• Record Type: Book
• Further Information: Note: J. Reece Roth.
• Other Names: Roth, J. Reece
• Contents: Surface Interactions in Plasma Processing; Atmospheric Pressure Plasma Sources; Vacuum Plasma Sources; Plasma Reactors for Plasma Processing; Specialized Techniques and Devices for Plasma Processing; Parametric Plasma Effects on Plasma Processing; Diagnostics for Plasma Processing; Plasma Treatment of Surfaces; Surface Modification by Implantation and Diffusion; Thin Film Deposition by Evaporative Condensation and Sputtering; Plasma Chemical Vapor Deposition (PCVD); Plasma Etching
• Publisher Details: Place of publication not identified : CRC Press
• Publication Date: 2001
• Extent: 1 online resource (658 pages)
• Subjects: 621.044; Plasma engineering; Manufacturing processes; Manufacturing processes; Plasma engineering; Plasmatechnik; Gaselektronik; Plasma engineering
• Languages: English
• ISBNs: 9781420034127
• Related ISBNs: 142003412X
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.