Fabrication of silicon microprobes for optical near-field applications. (©2002)

• Record Type: Book
• Further Information: Note: Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi.
• Other Names: Minh, Phan Ngoc; Esashi, Masayoshi, 1949-; Takahito, Ono
• Contents: 1. Introduction; 2. Introduction to near-field optics; 3. Introduction to silicon micromachining technology; 4. Fabrication of silicon microprobes for optical near-field applications; 5. Evaluation of microfabricated optical near-field probes; 6. Novel probes for locally enhancing near-field light and other applications; 7. Simulation using the finite difference time domain (FDTD) method; 8. Subwavelength optical imaging with fabricated probes; 9. Optical near-field lithography.
• Publisher Details: Boca Raton, Fla : CRC Press
• Publication Date: 2002
• Copyright Date: 2002
• Extent: 1 online resource (180 pages), illustrations
• Subjects: 621.36; Micromachining; Microprobe analysis; Near-field microscopy; Silicon; TECHNOLOGY & ENGINEERING -- Optics; Micromachining; Microprobe analysis; Near-field microscopy; Silicon; Electronic books
• Languages: English
• ISBNs: 1420040707; 9781420040708
• Related ISBNs: 0849311543; 9780849311543
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.