Modeling MEMS and NEMS. (2003)

• Record Type: Book
• Further Information: Note: John A. Pelesko and David H. Bernstein.
• Other Names: Pelesko, John A; Bernstein, David H
• Contents: INTRODUCTION; MEMS and NEMS; A Capsule History of MEMS and NEMS; Dimensional Analysis and Scaling; Exercises; A REFRESHER ON CONTINUUM MECHANICS; Introduction; The Continuum Hypothesis; Heat Conduction; Elasticity; Linear Thermoelasticity; Fluid Dynamics; Electromagnetism; Numerical Methods for Continuum Mechanics; SMALL IS DIFFERENT; The Backyard; Scaling; Systems; Exercises; THERMALLY DRIVEN SYSTEMS; Introduction; Thermally Driven Devices; From PDE to ODE: Lumped Models; Joule Heating of a Cylinder; Analysis of Thermal Data Storage; Exercises; MODELING ELASTIC STRUCTURES; Introduction; Examples of Elastic Structures in MEMS/NEMS; The Mass on a Spring; Membranes; Beams; Plates; The Capacitive Pressure Sensor; Exercises; MODELING COUPLED THERMAL-ELASTIC SYSTEMS; Introduction; Devices and Phenomena in Thermal-Elastic Systems; Modeling Thermopneumatic Systems; The Thermoelastic Rod Revisited; Modeling Thermoelastic V-Beam Actuators; Modeling Thermal Bimorph Actuators; Modeling Bimetallic Thermal Actuators; Exercises; MODELING ELECTROSTATIC-ELASTIC SYSTEMS; Introduction; Devices Using Electrostatic Actuation; The Mass-Spring Model; Modeling General Electrostatic-Elastic Systems; Electrostatic-Elastic Systems - Membrane Theory; Electrostatic-Elastic Systems - Beam and Plate Theory; Analysis of Capacitive Control Schemes; Exercises; MODELING MAGNETICALLY ACTUATED SYSTEMS; Introduction; Magnetically Driven Devices; Mass-Spring Models; A Simple Membrane Micropump Model; A Small-Aspect Ratio Model; Exercises; MICROFLUIDICS; Introduction; Microfluidic Devices; More Fluidic Scaling; Modeling Squeeze Film Damping; Exercises; BEYOND CONTINUUM THEORY; Introduction; Limits of Contiuum Mechanics; Devices and Systems Beyond Continuum Theory; Exercises; REFERENCES; APPENDICES; Mathematical Results; Physical Constants; INDEX; ; Each chapter also contains Related Reading and Notes sections.
• Publisher Details: Boca Raton, FL : Chapman & Hall/CRC
• Publication Date: 2003
• Extent: 1 online resource (xxiii, 357 pages), illustrations
• Subjects: 621.3; Microelectromechanical systems -- Mathematical models; TECHNOLOGY & ENGINEERING -- Electrical; Microelectromechanical systems -- Mathematical models; Mikroelektromekaniska system; Nanoteknik; Electronic books
• Languages: English
• ISBNs: 1584883065; 9781584883067; 1420035290; 9781420035292
• Notes: Note: Includes bibliographical references and i (pages 325-340) and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.