Micro electro mechanical system design. (2005)

• Record Type: Book
• Further Information: Note: James J. Allen.
• Other Names: Allen, James J
• Contents: Table of; INTRODUCTION; Historical Perspective; The Development of MEMS Technology; MEMS: Present and Future; MEMS Challenges; The Aim of This Book; Questions; References; ; FABRICATION PROCESSES; Materials; Starting Material - Substrates; Physical Vapor Deposition (PVD); Chemical Vapor Deposition (CVD); Etching Processes; Patterning; Wafer Bonding; Annealing; Chemical Mechanical Polishing (CMP); Material Doping; Summary; Questions; References; ; MEMS TECHNOLOGIES; Bulk Micromachining; LIGA; Sacrificial Surface Micromachining; Integration of Electronics and MEMS Technology (IMEMS); Technology Characterization; Alternative MEMS Materials; Summary; Questions; References; ; SCALING ISSUES FOR MEMS; Scaling of Physical Systems; Computational Issues of Scale; Fabrication Issues of Scale; Material Issues; Newly Relevant Physical Phenomena; Summary; Questions; References; ; DESIGN REALIZATION TOOLS FOR MEMS; Layout; SUMMiT™ Technology Layout; Design Rules; Standard Components; MEMS Visualization; MEMS Analysis; Summary; Questions; References; ; ELECTROMECHANICS; Structural Mechanics; Damping; Electrical System Dynamics; Questions; References; ; MODELING AND DESIGN; Design Synthesis Modeling; Lagrange's Equations; Numerical Modeling; Design Uncertainty; Problems; References; ; MEMS SENSORS AND ACTUATORS; MEMS Actuators; MEMS Sensing; Questions; References; ; PACKAGING; Packaging Process Steps; Packaging Case Studies; Summary; Questions; References; ; RELIABILITY; Reliability Theory and Terminology; Essential Aspects of Probability and Statistics for Reliability; Reliability Models; MEMS Failure Mechanisms; Measurement Techniques for MEMS Operational, Reliability and Failure Analysis Testing; MEMS Reliability and Design; MEMS Reliability Case Studies; Summary; Questions; References; ; APPENDIX; Glossary; Prefixes; Micro-MKS Conversions; Physical Constants; Material Properties; Stiffness Coefficients of Frequently Used MEMS Flexures; Common MEMS Cross-Section Properties; Design Synthesis Software and Files
• Publisher Details: Boca Raton : Taylor & Francis
• Publication Date: 2005
• Extent: 1 online resource (465 pages), illustrations
• Subjects: 621; Engineering design; Microelectromechanical systems -- Design and construction; TECHNOLOGY & ENGINEERING -- Mechanical; Engineering design; Microelectromechanical systems -- Design and construction; Electronic books
• Languages: English
• ISBNs: 0824758242; 9780824758240; 1420027751; 9781420027754
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.