Handbook of lapping and polishing. (©2007)

• Record Type: Book
• Further Information: Note: Edited by Ioan D. Marinescu, Eckart Uhlmann, Toshiro K. Doi.
• Other Names: Marinescu, Ioan D; Uhlmann, Eckart; Doi, Toshiro K, 1947-
• Contents: Front cover; Preface; Editors; Contributors; Table of Contents; Chapter 1. Introduction; Chapter 2. Fundamentals of Lapping; Chapter 3. Lapping of Ductile Materials; Chapter 4. Lapping of Brittle Materials; Chapter 5. Lapping and Lapping Machines; Chapter 6. Polishing Technology; Chapter 7. Chemical Mechanical Polishing and Its Applications in ULSI Process; Index; Back cover.
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2007
• Copyright Date: 2007
• Extent: 1 online resource (491 pages), illustrations
• Subjects: 671.3/5; Grinding and polishing -- Handbooks, manuals, etc; Grinding and polishing -- Handbooks, manuals, etc; TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades; Grinding and polishing; Electronic books; Handbooks and manuals
• Languages: English
• ISBNs: 9781420017632; 1420017632; 1280730226; 9781280730221
• Related ISBNs: 1574446703; 9781574446708
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.