Handbook of lapping and polishing. (©2007)
- Record Type:
- Book
- Title:
- Handbook of lapping and polishing. (©2007)
- Main Title:
- Handbook of lapping and polishing
- Further Information:
- Note: Edited by Ioan D. Marinescu, Eckart Uhlmann, Toshiro K. Doi.
- Other Names:
- Marinescu, Ioan D
Uhlmann, Eckart
Doi, Toshiro K, 1947- - Contents:
- Front cover; Preface; Editors; Contributors; Table of Contents; Chapter 1. Introduction; Chapter 2. Fundamentals of Lapping; Chapter 3. Lapping of Ductile Materials; Chapter 4. Lapping of Brittle Materials; Chapter 5. Lapping and Lapping Machines; Chapter 6. Polishing Technology; Chapter 7. Chemical Mechanical Polishing and Its Applications in ULSI Process; Index; Back cover.
- Publisher Details:
- Boca Raton, FL : CRC Press
- Publication Date:
- 2007
- Copyright Date:
- 2007
- Extent:
- 1 online resource (491 pages), illustrations
- Subjects:
- 671.3/5
Grinding and polishing -- Handbooks, manuals, etc
Grinding and polishing -- Handbooks, manuals, etc
TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades
Grinding and polishing
Electronic books
Handbooks and manuals - Languages:
- English
- ISBNs:
- 9781420017632
1420017632
1280730226
9781280730221 - Related ISBNs:
- 1574446703
9781574446708 - Notes:
- Note: Includes bibliographical references and index.
Note: Print version record. - Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.159105
- Ingest File:
- 01_070.xml