Photonic MEMS devices : design, fabrication and control /: design, fabrication and control. (©2009)

• Record Type: Book
• Other Titles: Photonic micro-electro-mechanical systems devices; Optical and photonic MEMS device
• Further Information: Note: Ai-Qun Liu ; co-authors, Xuming Zhang [and others].
• Other Names: Liu, Ai-Qun
• Contents: MEMS Optical Switches and Systems ; J. Li and A. Q. Liu ; Design of MEMS Optical Switches ; J. Li and A. Q. Liu ; MEMS Thermo-Optic Switches ; J. Li and T. Zhong ; PHC Microresonators Dynamic Modulation Devices ; S. T. Hwee Gee and A.Q. Liu ; MEMS Variable Optical Attenuators ; X. Zhang, H. Cai, and A.Q. Liu ; MEMS Discretely Tunable Lasers ; X. Zhang and H. Cai ; MEMS Continuously Tunable Lasers ; X. Zhang and A. Q. Liu ; MEMS Injection-Locked Lasers ; X. Zhang and A. Q. Liu ; Deep Etching Fabrication Process ; J. Li and A. Q. Liu ; Deep Submicron Photonic Bandgap Crystal Fabrication Processes ; S. H. G. Teo and A. Q. Liu ; Control Strategies for Electrostatic MEMS Devices ; B. Borovic and F. L. Lewis ; Control of Optical Devices ; B. Borovic and F. L. Lewis
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2009
• Copyright Date: 2009
• Extent: 1 online resource (483 pages), illustrations
• Subjects: 621.381; Microelectromechanical systems; Photonics; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; TECHNOLOGY & ENGINEERING -- Electronics -- Digital; Microelectromechanical systems; Photonics; Fotonik; Mikroelektromekaniska system; Electronic books
• Languages: English
• ISBNs: 9781420045710; 1420045717; 1281723762; 9781281723765
• Related ISBNs: 9781420045680; 1420045687
• Notes: Note: Includes bibliographical references.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.