Handbook of optical metrology : principles and applications /: principles and applications. (2008)

• Record Type: Book
• Further Information: Note: Toru Yoshizawa, editor.
• Other Names: Yoshizawa, Toru, 1939-; CRC Press.
• Contents: Computer generated contents: Chapt. 1. Light sources -- chapt. 2. Lenses, prisms, and mirrors -- chapt. 3. Optoelectronic sensors -- chapt. 4. Optical devices and optomechanical elements -- chapt. 5. Propagation of light -- chapt. 6. Interferometry -- chapt. 7. Holography -- chapt. 8. Speckle methods and applications -- chapt. 9. Moire metrology -- chapt. 10. Optical heterodyne measurement method -- chapt. 11. Diffraction -- chapt. 12. Light scattering -- chapt. 13. Polarization -- chapt. 14. Near-field optics -- chapt. 15. Length and size -- chapt. 16. Displacement -- chapt. 17. Straightness and alignment -- chapt. 18. Flatness -- chapt. 19. Surface profilometry -- chapt. 20. Three-dimensional shape measurement -- chapt. 21. Fringe analysis -- chapt. 22. Photogrammetry -- chapt. 23. Optical methods in solid mechanics -- chapt. 24. Optical methods in flow measurement -- chapt. 25. Polarimetry -- chapt. 26. Birefringence measurement -- chapt. 27. Ellipsometry -- chapt. 28. Optical thin film and coatings -- chapt. 29. Film surface and thickness profilometry -- chapt. 30. On-machine measurements.
• Publisher Details: Boca Raton : Taylor & Francis
• Publication Date: 2008
• Extent: 1 online resource (xiii, 730 pages), illustrations
• Subjects: 681/.25; Optical measurements -- Handbooks, manuals, etc; Metrology -- Handbooks, manuals, etc; Metrology; Optical measurements; Electronic books; Handbooks and manuals
• Languages: English
• ISBNs: 9781420019513; 1420019511
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.