Fundamentals of microfabrication and nanotechnology. manufacturing techniques and applications /: manufacturing techniques and applications. From MEMS to bio-MEMS and bio-NEMS : Volume III, (©2012)

• Record Type: Book
• Other Titles: From MEMS to bio-MEMS and bio-NEMS
• Further Information: Note: Marc J. Madou.
• Other Names: Madou, Marc J
• Contents: From traditional manufacturing to nanotechnology -- Nonlithography-based (traditional) and lithography-based (nontraditional) manufacturing compared -- Nature as an engineering guide : biomimetics -- Nanotechnology : top-down and bottom-up manufacturing approaches compared -- Packaging, assembly, and self-assembly -- SElected materials and processes for MEMS and NEMS -- Metrology and MEMS/NEMS modeling -- Scaling laws, actuators, and power and brains in miniatrure devices -- Scaling laws -- Actuators -- Power and brains in miniature devices -- Miniaturization application -- MEMS and NEMS applications.
• Edition: Third edition
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2012
• Copyright Date: 2012
• Extent: 1 online resource (xiii, 636 pages), illustrations (some color)
• Subjects: 681/.2; BioMEMS; Nanoelectromechanical systems; TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS; TECHNOLOGY & ENGINEERING -- Material Science; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; BioMEMS; Nanoelectromechanical systems
• Languages: English
• ISBNs: 9781439895245; 1439895244
• Related ISBNs: 9781420055160; 142005516X
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.