Plasma processing of nanomaterials. (©2012)

• Record Type: Book
• Further Information: Note: Edited by R. Mohan Sankaran.
• Other Names: Sankaran, R. Mohan (Ramanathan Mohan)
• Contents: 1. Nanoscale etching and deposition / Nathan Marchack and Jane P. Chang -- 2. Extreme ultraviolet light lithography for producing nanofeatures in next-generation semiconductor processing / John Sporre and David N. Ruzic -- 3. Nonthermal plasma synthesis of semiconductor nanocrystals / Uwe Kortshagen and Lorenzo Mangolini -- 4. Microscale plasmas for metal and metal oxide nanoparticle synthesis / Davide Mariotti and R. Mohan Sankaran -- 5. Large-scale, plasma-assisted growth of nanowires / Uros Cvelbar and Mahendra K. Sunkara -- 6. Cathodic arc discharge for synthesis of carbon nanoparticles / Manish Chhowalla and H. Emrah Unalan -- 7. Atmospheric plasmas for carbon nanotubes (CNTs) / Jae Beom Park, Se Jin Kyung, and Geun Young Yeom -- 8. Structural control of single-walled carbon nanotubes by plasma chemical vapor deposition / Rikizo Hatakeyama and Toshiaki Kato -- 9. Graphene growth by plasma-enhanced chemical vapor deposition (PECVD) / M. Meyyappan and Jeong-Soo Lee -- 10. Modeling aspects of plasma-enhanced chemical vapor deposition of carbon-based materials / Erik Neyts [and others] -- 11. Modeling catalytic growth of one-dimensional nanostructures / Eugene Tam, Kostya (Ken) Ostrikov, and Tony Murphy -- 12. Diagnostics of energy fluxes in dusty plasmas / Horst R. Maurer and Holger Kersten -- 13. Selective functionalization and modification of carbon nanomaterials by plasma techniques / Yuhua Xue and Liming Dai -- 14. Plasma-liquid interactions for fabrication of nanobiomaterials / Toshiro Kaneko and Rikizo Hatakeyama -- 15. Assembly and self-organization of nanomaterials / Amanda Evelyn Rider and Kostya (Ken) Ostrikov.
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2012
• Copyright Date: 2012
• Extent: 1 online resource (xiii, 408 pages), illustrations (some color)
• Subjects: 620/.5; Nanostructured materials; Plasma engineering; SCIENCE -- Physics; TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics; TECHNOLOGY & ENGINEERING -- Material Science; SCIENCE -- Nanoscience; TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS; Nanostructured materials; Plasma engineering; Electronic books
• Languages: English
• ISBNs: 1439866775; 9781439866771
• Related ISBNs: 9781439866764; 1439866767
• Notes: Note: Includes bibliographical references and index.; Note: Print version record.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.