Nano-CMOS gate dielectric engineering. (©2012)

• Record Type: Book
• Further Information: Note: Hei Wong.
• Other Names: Wong, Hei
• Contents: 1. Overview of CMOS technology -- 2. High-k dielectrics -- 3. Complex forms of high-k oxides -- 4. Dielectric interfaces -- 5. Impacts on device operation -- 6. Fabrication issues -- 7. Conclusions.
• Publisher Details: Boca Raton, FL : CRC Press
• Publication Date: 2012
• Copyright Date: 2012
• Extent: 1 online resource (xiv, 234 pages), illustrations
• Subjects: 621.3815/28; Metal oxide semiconductors, Complementary -- Design and construction; Dielectrics; Gate array circuits; Nanoelectronics -- Materials; TECHNOLOGY & ENGINEERING -- Mechanical; Electronic books
• Languages: English
• ISBNs: 1439849609; 9781439849606; 1283350459; 9781283350457
• Related ISBNs: 9781439849590; 1439849595
• Notes: Note: Includes bibliographical references and index.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.