Silicon wet bulk micromachining for MEMS. (2017)
- Record Type:
- Book
- Title:
- Silicon wet bulk micromachining for MEMS. (2017)
- Main Title:
- Silicon wet bulk micromachining for MEMS
- Further Information:
- Note: Edited by Prem Pal, Kazuo Sato.
- Editors:
- Ashk, Prem Pāl, 1932-
Sato, Kazuo - Publisher Details:
- Singapore : Pan Stanford Publishing
- Publication Date:
- 2017
- Extent:
- 1 online resource
- Subjects:
- 621.381
Microelectromechanical systems
Microelectromechanical systems -- Materials
Silicon -- Electric properties - Languages:
- English
- ISBNs:
- 9781315341279
9789814613736
9781315322308
9781315364926 - Related ISBNs:
- 9789814613729
- Notes:
- Note: Description based on CIP data; item not viewed.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.132999
- Ingest File:
- 02_063.xml