Metrology and diagnostic techniques for nanoelectronics. (2017)

Record Type:: Book
Title:: Metrology and diagnostic techniques for nanoelectronics. (2017)
Main Title:: Metrology and diagnostic techniques for nanoelectronics
Further Information:: Note: Edited by Zhiyong Ma, David G. Seiler.
Editors:: Ma, Zhiyong
Seiler, David G
Publisher Details:: Singapore : Pan Stanford Publishing
Publication Date:: 2017
Extent:: 1 online resource, illustrations
Subjects:: 621.381
Nanoelectronics
Metrology
Microtechnology
Languages:: English
ISBNs:: 9781351733946
Related ISBNs:: 9781315185385
9781351733939
9781351733953
Notes:: Note: Description based on CIP data; resource not viewed.
Access Rights:: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
Access Usage:: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library HMNTS - ELD.DS.129216
Ingest File:: 02_107.xml