Materials and failures in MEMS and NEMS. ([2015])
- Record Type:
- Book
- Title:
- Materials and failures in MEMS and NEMS. ([2015])
- Main Title:
- Materials and failures in MEMS and NEMS
- Further Information:
- Note: Edited by Atul Tiwari and Baldev Raj.
- Editors:
- Tiwari, Atul
Raj, Baldev, 1947-2018 - Publisher Details:
- Hoboken, New Jersey Salem, Massachusetts : Wiley Scrivener Publishing
- Publication Date:
- 2015
- Extent:
- 1 online resource
- Subjects:
- 621.381
Microelectromechanical systems -- Design and construction
Nanoelectromechanical systems -- Design and construction - Languages:
- English
- ISBNs:
- 9781119083863
9781119083870 - Related ISBNs:
- 9781119083603
- Notes:
- Note: Includes bibliographical references and index.
- Access Rights:
- Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
- Access Usage:
- Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library HMNTS - ELD.DS.41446
- Ingest File:
- 01_061.xml