Optical diagnostics for thin film processing. (1996)

• Record Type: Book
• Further Information: Note: Irving P. Herman.
• Other Names: Herman, Irving P
• Contents: 1. Overview of Optical Diagnostics -- 2. The Properties of Light -- 3. The Structure of Matter -- 4. Interactions of Light with Matter for Spectroscopy -- 5. Diagnostics Equipment and Methods -- 6. Optical Emission Spectroscopy -- 7. Laser-Induced Fluorescence -- 8. Transmission (Absorption) -- 9. Reflection -- 10. Interferometry and Photography -- 11. Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry) -- 12. Raman Scattering -- 13. Pyrometry -- 14. Photoluminescence -- 15. Spectroscopies Employing Laser Heating -- 16. Nonlinear Optical Diagnostics -- 17. Optical Electron/Ion Probes -- 18. Optical Thermometry -- 19. Data Analysis and Process Control.
• Publisher Details: Place of publication not identified : Academic Press
• Publication Date: 1996
• Extent: 1 online resource (783 pages)
• Subjects: 621.3815/2/0287; Thin films -- Surfaces; Spectrum analysis -- Industrial applications; Spectrum analysis -- Industrial applications; Thin films -- Surfaces; Spectroscopie -- Applications industrielles; Couches minces -- Surfaces; Spectroscopie; Dünne Schicht; Optische Eigenschaft; Dünne Schicht; Optische Eigenschaft
• Languages: English
• ISBNs: 9780080538082; 0080538088
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.