Materials processing by cluster ion beams : history, technology, and applications /: history, technology, and applications. (2015)

• Record Type: Book
• Further Information: Note: Isao Yamada.
• Authors: Yamada, I (Isao)
• Contents: Acknowledgments Preface Author Ion Beam Technology: Overview and History Overview History References History and Milestones of Cluster Beam Development Cluster Beam Discovery and Early Fundamental Progress Development of Gas Cluster Beam Equipment Precursor Technology Origination of Gas Cluster Ion Beam Technology Development of Gas Cluster Ion Beam Processing Development of Polyatomic Ion Beam Processing References Development of Cluster Beam Sources for Solid Materials Gas Condensation and Aggregation Sources Pure Expansion Source Arc Vaporization Sources Laser Irradiation Sources Ion and Plasma Sputtering Sources Polyatomic Sources References Gas Cluster Ion Beam Equipment Gas Cluster Ion Beam Equipment for Process Applications Generation of Gas Cluster Beams Ionization of Gas Cluster Beams Electron Energy Dependence Cluster Size Dependence Ionization Efficiency Dependence Cluster Size Distributions Beam Transport Characteristics of Cluster Ion Beams References Cluster Ion-Solid Surface Interaction Kinetics Gas Cluster Ion Beams Polyatomic Ion Beams References Cluster Ion Beam Sputtering Lateral Sputtering Physical Sputtering Reactive Sputtering Surface Smoothing References Cluster Ion Implantation Gas Cluster Ion Implantation: Infusion Doping Process Polyatomic Cluster Ion Implantation References Cluster Ion Beam-Assisted Deposition Oxide Films Diamondlike Carbon Films References Applications Nanoscale Etching and Smoothing for Optical and Magnetic Devices Highly Anisotropic Etching Processing Semiconductor Device Fabrication GCIB Infusion Doping Polyatomic Cluster Ion Doping Analytical Instrumentation Applications Biomaterial Applications GCIB Processing for Biomaterial Applications ANAB Processing for Biomaterial Applications References Conclusions Index
• Edition: 1st
• Publisher Details: Boca Raton : CRC Press
• Publication Date: 2015
• Extent: 1 online resource, illustrations (black and white)
• Subjects: 620.44; Surfaces (Technology); Focused ion beams
• Languages: English
• ISBNs: 9781498711760; 9781498733878
• Related ISBNs: 9781498711753
• Notes: Note: Description based on CIP data; item not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.