Electrochemical micromachining for nanofabrication, MEMS and nanotechnology. (2015)

• Record Type: Book
• Further Information: Note: Bijoy Bhattacharyya.
• Authors: Bhattacharyya, Bijoy
• Contents: 1. Introduction 2. Electrochemical Machining: Macro to Micro 3. Principle of Material Removal in EMM 4. Types of EMM 5. Electrochemical Micromachining (EMM) Setup 6. Design and Development of Micro Tools 7. Influencing Factors of EMM 8. Improvement of Machining Accuracy 9. Advantages, Applications and Limitations of EMM 10. Micro-Features Fabrication for MEMS and Other Microengineering Applications 11. Electrochemical Micro System Technology (EMST) 12. Recent Advancements in EMM for Nanofabrication 13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications
• Publisher Details: Norwich : William Andrew
• Publication Date: 2015
• Extent: 1 online resource
• Subjects: 671.35; Micromachining; Nanotechnology
• Languages: English
• ISBNs: 9780323352888
• Notes: Note: Description based on CIP data; resource not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.