Developments in surface contamination and cleaning. Cleaning techniques / (2015)

• Record Type: Book
• Further Information: Note: Rajiv Kohli, Kashmiri L. Mittal.
• Authors: Kohli, Rajiv, 1947-; Mittal, K. L, 1945-
• Contents: 1 Cleaning for Removal of Post Chemical Mechanical Planarization Residue (Manish Keswani); 2 Liquid Displacement Drying Techniques (Ian Parry); 3 UV Ozone Cleaning (Rajiv Kohli); 4 Carbon Dioxide Dry Ice Spray Cleaning (Simon Motschmann); 5 Use of Water Ice Pellets for Removal of Surface Contaminants (Rajiv Kohli); 6 Advanced Cleaning Processes in Semiconductor Manufacturing (Mahmood Toofan); 7 Precision Cleaning of Electronic Assemblies (Helmut Schweigert)
• Publisher Details: Norwich : William Andrew
• Publication Date: 2015
• Extent: 1 online resource
• Subjects: 620.44; Surfaces (Technology); Surface contamination -- Prevention; Particles -- Measurement; Cleaning; Coatings; Dust control
• Languages: English
• ISBNs: 9780323312714
• Related ISBNs: 9780323299619
• Notes: Note: Includes bibliographical references and index.; Note: Description based on CIP data; item not viewed.
• Access Rights: Legal Deposit; Only available on premises controlled by the deposit library and to one user at any one time; The Legal Deposit Libraries (Non-Print Works) Regulations (UK).
• Access Usage: Restricted: Printing from this resource is governed by The Legal Deposit Libraries (Non-Print Works) Regulations (UK) and UK copyright law currently in force.