Subject: sputter -- annealing -- AlN -- dislocation density - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Subject sputter -- annealing -- AlN -- dislocation density

Authors:: Gu, Wen; Liu, Zhibin; Guo, Yanan; Wang, Xiaodong; Jia, Xiaolong; Liu, Xingfang; Zeng, Yiping; Wang, Junxi; Li, Jinmin; Yan, Jianchang
Journal:: Journal of semiconductors
Issue:: Volume 41:Number 12(2020)
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Record Type:: Journal Article
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