1. Effect of space charge on the negative oxygen flux during reactive sputtering. (14th February 2017) Authors: Moens, F; Kalvas, T; Van Steenberge, S; Depla, D Journal: Journal of physics Issue: Volume 50:Number 11(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗