1. Simulation of the proton implantation process in silicon. Issue 10 (19th July 2016) Authors: Faccinelli, Martin; Jelinek, Moriz; Wuebben, Thomas; Laven, Johannes G.; Schulze, Hans‐Joachim; Hadley, Peter Journal: Physica status solidi Issue: Volume 13:Issue 10-12(2016) Page Start: 750 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗