1. Simulation of hollow-cathode-nitriding plasma and design of diffusion equipment with DC and RF dual discharge. (1st February 2023) Authors: Zhang, Zhehao; Wang, Zhengwei; Shao, Minghao; Yan, Jiwen; He, Yongyong; Li, Yang Journal: Physica scripta Issue: Volume 98:Number 2(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗