1. Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides. Issue 19 (27th May 2015) Authors: Zhou, Lan; Suram, Santosh K.; Becerra-Stasiewicz, Natalie; Mitrovic, Slobodan; Kan, Kevin; Jones, Ryan J.R.; Gregoire, John M. Journal: Journal of materials research Issue: Volume 30:Issue 19(2015) Page Start: 2928 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗