1. Design, fabrication, and characterization of bridge-type micro-hotplates with an SU-8 supporting layer for a smart gas sensing system. (11th January 2017) Authors: Iwata, T; Soo, W P C; Matsuda, K; Takahashi, K; Ishida, M; Sawada, K Journal: Journal of micromechanics and microengineering Issue: Volume 27:Number 2(2017:Feb.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗