1. Hydrogen atom kinetics in capacitively coupled plasmas. (6th April 2017) Authors: Nunomura, Shota; Katayama, Hirotaka; Yoshida, Isao Journal: Plasma sources science & technology Issue: Volume 26:Number 5(2017:Oct.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗