1. Removal of Mo/Si multilayer coatings on fused silica substrates by wet chemical etching. (23rd April 2021) Authors: Toyoda, Mitsunori; Yokoyama, Ryo; Waki, Shuntaro; Kakudate, Toshiyuki; Chen, Jun Journal: Applied physics express Issue: Volume 14:Number 5(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗